Substrate heating effects on hardness of an x-A12O3 thick film formed by aerosol deposition method

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Substrate heating effects on hardness of an x-A12O3 thick film formed by aerosol deposition method

Bibliographic Details
Main Authors:	Lebedev, Maxim, Akedo, J., Ito, T.
Format:	Journal Article
Published:	Elsevier Science BV 2004
Online Access:	http://hdl.handle.net/20.500.11937/3788

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