Substrate heating effects on hardness of an x-A12O3 thick film formed by aerosol deposition method

Substrate heating effects on hardness of an x-A12O3 thick film formed by aerosol deposition method

Bibliographic Details
Main Authors: Lebedev, Maxim, Akedo, J., Ito, T.
Format: Journal Article
Published: Elsevier Science BV 2004
Online Access:http://hdl.handle.net/20.500.11937/3788

Internet

http://hdl.handle.net/20.500.11937/3788

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