Pathways for thermal phosphorus desorption from the silicon (001) surface
We use density-functional theory and transition-state search methods to characterize the thermal desorption of P2 molecules from the phosphorus-doped silicon 001 surface. We compare two desorption pathways, one proceeding via an in-surface P-P homodimer, the other via an on-surface P-P addimer. Whil...
| Main Authors: | , , , |
|---|---|
| Format: | Journal Article |
| Published: |
American Physical Society
2010
|
| Online Access: | http://hdl.handle.net/20.500.11937/27831 |