Low-temperature quartz wafer bonding using hyperbranched polyurethane oligomers
In this paper, we introduce a new bonding technology for the assembly of micro- structured glass substrates for miniaturized chemical analysis. The protocol features a facile polymer chemistry method processing at lower temperatures (<100 °C). The method consisted of a proper cleaning of the...
| Main Authors: | , , |
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| Format: | Journal Article |
| Published: |
Springer
2014
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| Online Access: | http://hdl.handle.net/20.500.11937/26670 |