Nano-scale elastic-plastic properties and indentation-induced deformation of single crystal 4H-SiC
The nanoscale elastic-plastic response of single crystal 4H-SiC has been investigated by nanoindentationwith a Berkovich tip. The hardness (H) and elastic modulus (E) determined in the load-independent region were 36±2 GPa and 413±8 GPa, respectively. The indentation size effect (ISE) of hardness wi...
| Main Authors: | , , , |
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| Format: | Journal Article |
| Published: |
Elsevier
2017
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| Online Access: | http://hdl.handle.net/20.500.11937/23175 |