Atomic-scale observation and control of the reaction of phosphine with silicon

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Atomic-scale observation and control of the reaction of phosphine with silicon

Bibliographic Details
Main Authors:	Schofield, S., Curson, N., Simmons, M., Warschkow, O., Marks, Nigel, Wilson, H., McKenzie, D., Smith, P., Radny, M.
Format:	Journal Article
Published:	The Surface Science Society of Japan 2006
Online Access:	http://hdl.handle.net/20.500.11937/22646

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