Atomic-scale observation and control of the reaction of phosphine with silicon

Atomic-scale observation and control of the reaction of phosphine with silicon

Bibliographic Details
Main Authors: Schofield, S., Curson, N., Simmons, M., Warschkow, O., Marks, Nigel, Wilson, H., McKenzie, D., Smith, P., Radny, M.
Format: Journal Article
Published: The Surface Science Society of Japan 2006
Online Access:http://hdl.handle.net/20.500.11937/22646

Internet

http://hdl.handle.net/20.500.11937/22646

Similar Items