Diffusion pathways of phosphorus atoms on silicon (001)
Using density-functional theory and a combination of growing string and dimer method transition state searches, we investigate the interaction of phosphorus atoms with the silicon (001) surface. We report reaction pathways for three technologically important processes: diffusion of phosphorus adatom...
| Main Authors: | , , , |
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| Format: | Journal Article |
| Published: |
American Physical Society
2009
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| Online Access: | http://hdl.handle.net/20.500.11937/22583 |