Cubic aluminum nitride transformed under reduced pressure using aerosol deposition method

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Cubic aluminum nitride transformed under reduced pressure using aerosol deposition method

Higher thermal conductivity is expected for cubic aluminum nitride that is very difficult to make. Thick aluminum nitride films that have mixed crystal structures of rock salt (cubic) and wurtzite are made at room temperature by aerosol deposition method. The maximum micro-Vickers hardness number is...

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Bibliographic Details
Main Authors:	Iwata, A., Akedo, J., Lebedev, Maxim
Format:	Journal Article
Published:	BLACKWELL PUBLISHING 2005
Online Access:	http://hdl.handle.net/20.500.11937/22484

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