Cubic aluminum nitride transformed under reduced pressure using aerosol deposition method
Higher thermal conductivity is expected for cubic aluminum nitride that is very difficult to make. Thick aluminum nitride films that have mixed crystal structures of rock salt (cubic) and wurtzite are made at room temperature by aerosol deposition method. The maximum micro-Vickers hardness number is...
| Main Authors: | , , |
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| Format: | Journal Article |
| Published: |
BLACKWELL PUBLISHING
2005
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| Online Access: | http://hdl.handle.net/20.500.11937/22484 |