On the intrinsic hardness of a metallic film/substrate system: Indentation size and substrate effects

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On the intrinsic hardness of a metallic film/substrate system: Indentation size and substrate effects

To examine effects of indentation size and substrate on the hardness determination of thin films, two typical types of hard film/soft substrate (Ni/Fe) and soft film/hard substrate (Al/Si and Al/glass) systems are investigated. A simple model is proposed to predict the intrinsic hardness of thin fil...

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Bibliographic Details
Main Authors:	Ma, Z., Zhou, Y., Long, S., Lu, Chunsheng
Format:	Journal Article
Published:	ELSEVIER 2012
Subjects:	film/substrate system strain gradient effect substrate effect hardness indentation
Online Access:	http://hdl.handle.net/20.500.11937/20866

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