On the intrinsic hardness of a metallic film/substrate system: Indentation size and substrate effects

To examine effects of indentation size and substrate on the hardness determination of thin films, two typical types of hard film/soft substrate (Ni/Fe) and soft film/hard substrate (Al/Si and Al/glass) systems are investigated. A simple model is proposed to predict the intrinsic hardness of thin fil...

Full description

Bibliographic Details
Main Authors: Ma, Z., Zhou, Y., Long, S., Lu, Chunsheng
Format: Journal Article
Published: ELSEVIER 2012
Subjects:
Online Access:http://hdl.handle.net/20.500.11937/20866