On the intrinsic hardness of a metallic film/substrate system: Indentation size and substrate effects
To examine effects of indentation size and substrate on the hardness determination of thin films, two typical types of hard film/soft substrate (Ni/Fe) and soft film/hard substrate (Al/Si and Al/glass) systems are investigated. A simple model is proposed to predict the intrinsic hardness of thin fil...
| Main Authors: | , , , |
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| Format: | Journal Article |
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ELSEVIER
2012
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| Online Access: | http://hdl.handle.net/20.500.11937/20866 |
| _version_ | 1848750429432709120 |
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| author | Ma, Z. Zhou, Y. Long, S. Lu, Chunsheng |
| author_facet | Ma, Z. Zhou, Y. Long, S. Lu, Chunsheng |
| author_sort | Ma, Z. |
| building | Curtin Institutional Repository |
| collection | Online Access |
| description | To examine effects of indentation size and substrate on the hardness determination of thin films, two typical types of hard film/soft substrate (Ni/Fe) and soft film/hard substrate (Al/Si and Al/glass) systems are investigated. A simple model is proposed to predict the intrinsic hardness of thin films, which allows a more accurate fitting to empirical data and the estimation of ultimate film hardness. The model can be used to interpret indentation data and extrapolate the indentation depth-hardness curve to an important region where indentation depth lies between 1% to 5 times of film thickness. The results are well consistent with the evolving trend of composite hardness obtained from experiments and numerical results by finite element analysis. |
| first_indexed | 2025-11-14T07:36:41Z |
| format | Journal Article |
| id | curtin-20.500.11937-20866 |
| institution | Curtin University Malaysia |
| institution_category | Local University |
| last_indexed | 2025-11-14T07:36:41Z |
| publishDate | 2012 |
| publisher | ELSEVIER |
| recordtype | eprints |
| repository_type | Digital Repository |
| spelling | curtin-20.500.11937-208662019-02-19T04:26:14Z On the intrinsic hardness of a metallic film/substrate system: Indentation size and substrate effects Ma, Z. Zhou, Y. Long, S. Lu, Chunsheng film/substrate system strain gradient effect substrate effect hardness indentation To examine effects of indentation size and substrate on the hardness determination of thin films, two typical types of hard film/soft substrate (Ni/Fe) and soft film/hard substrate (Al/Si and Al/glass) systems are investigated. A simple model is proposed to predict the intrinsic hardness of thin films, which allows a more accurate fitting to empirical data and the estimation of ultimate film hardness. The model can be used to interpret indentation data and extrapolate the indentation depth-hardness curve to an important region where indentation depth lies between 1% to 5 times of film thickness. The results are well consistent with the evolving trend of composite hardness obtained from experiments and numerical results by finite element analysis. 2012 Journal Article http://hdl.handle.net/20.500.11937/20866 10.1016/j.ijplas.2012.01.001 ELSEVIER fulltext |
| spellingShingle | film/substrate system strain gradient effect substrate effect hardness indentation Ma, Z. Zhou, Y. Long, S. Lu, Chunsheng On the intrinsic hardness of a metallic film/substrate system: Indentation size and substrate effects |
| title | On the intrinsic hardness of a metallic film/substrate system: Indentation size and substrate effects |
| title_full | On the intrinsic hardness of a metallic film/substrate system: Indentation size and substrate effects |
| title_fullStr | On the intrinsic hardness of a metallic film/substrate system: Indentation size and substrate effects |
| title_full_unstemmed | On the intrinsic hardness of a metallic film/substrate system: Indentation size and substrate effects |
| title_short | On the intrinsic hardness of a metallic film/substrate system: Indentation size and substrate effects |
| title_sort | on the intrinsic hardness of a metallic film/substrate system: indentation size and substrate effects |
| topic | film/substrate system strain gradient effect substrate effect hardness indentation |
| url | http://hdl.handle.net/20.500.11937/20866 |