On the intrinsic hardness of a metallic film/substrate system: Indentation size and substrate effects
To examine effects of indentation size and substrate on the hardness determination of thin films, two typical types of hard film/soft substrate (Ni/Fe) and soft film/hard substrate (Al/Si and Al/glass) systems are investigated. A simple model is proposed to predict the intrinsic hardness of thin fil...
| Main Authors: | , , , |
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| Format: | Journal Article |
| Published: |
ELSEVIER
2012
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| Subjects: | |
| Online Access: | http://hdl.handle.net/20.500.11937/20866 |
| Summary: | To examine effects of indentation size and substrate on the hardness determination of thin films, two typical types of hard film/soft substrate (Ni/Fe) and soft film/hard substrate (Al/Si and Al/glass) systems are investigated. A simple model is proposed to predict the intrinsic hardness of thin films, which allows a more accurate fitting to empirical data and the estimation of ultimate film hardness. The model can be used to interpret indentation data and extrapolate the indentation depth-hardness curve to an important region where indentation depth lies between 1% to 5 times of film thickness. The results are well consistent with the evolving trend of composite hardness obtained from experiments and numerical results by finite element analysis. |
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