Aerosol Deposition Method for Preparation of Lead Zirconate Titanate Thick Layer at Low Temperature –Improvement of Electrical Properties by Irradiation of Fast Atom Beam and Plasma

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Aerosol Deposition Method for Preparation of Lead Zirconate Titanate Thick Layer at Low Temperature –Improvement of Electrical Properties by Irradiation of Fast Atom Beam and Plasma

Bibliographic Details
Main Authors:	Akedo, J., Lebedev, Maxim, Baba, S.
Format:	Journal Article
Published:	Japan Society of Applied Physics 2003
Online Access:	http://hdl.handle.net/20.500.11937/20274

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