Aerosol Deposition Method for Preparation of Lead Zirconate Titanate Thick Layer at Low Temperature –Improvement of Electrical Properties by Irradiation of Fast Atom Beam and Plasma
| Main Authors: | , , |
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| Format: | Journal Article |
| Published: |
Japan Society of Applied Physics
2003
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| Online Access: | http://hdl.handle.net/20.500.11937/20274 |