A combinatorial investigation of sputtered Ta-Al-C thin films
We describe a combinatorial experiment investigating the Ta–Al–C material system, conducted with the aim of determining why the tantalum-containing Mn + 1AXn phases have so far proved to be not amenable to thin-film synthesis. Samples were deposited onto (0001) Al2O3 wafers at 850 °C and characteriz...
| Main Authors: | , , |
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| Format: | Journal Article |
| Published: |
Elsevier S.A.
2014
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| Subjects: | |
| Online Access: | http://hdl.handle.net/20.500.11937/18171 |