Performance of micromachined quartz gravimetric sensors upon electrochemical adsorption of monolayers
This paper presents the results of electrochemical calibration experiments performed on micromachined quartz gravimetric sensors. The absolute mass sensitivity of bulk acoustic quartz crystal microbalance (QCM) can be improved into the sub-10-12 g range upon miniaturization of the resonator thicknes...
| Main Authors: | , , , , , |
|---|---|
| Format: | Conference Paper |
| Published: |
2008
|
| Online Access: | http://hdl.handle.net/20.500.11937/11883 |
| _version_ | 1848747923750256640 |
|---|---|
| author | Kao, P. Patwardhan, A. Allara, D. Tadigadapa, S. Strutwolf, J. Arrigan, Damien |
| author_facet | Kao, P. Patwardhan, A. Allara, D. Tadigadapa, S. Strutwolf, J. Arrigan, Damien |
| author_sort | Kao, P. |
| building | Curtin Institutional Repository |
| collection | Online Access |
| description | This paper presents the results of electrochemical calibration experiments performed on micromachined quartz gravimetric sensors. The absolute mass sensitivity of bulk acoustic quartz crystal microbalance (QCM) can be improved into the sub-10-12 g range upon miniaturization of the resonator thickness and area. Using plasma etching, we have fabricated miniaturized QCMs with thicknesses of ~29 µ^m and diameters of 500 µ^m with f0=58 MHz. Resonators with 60 nm thick Ti/Pt top electrodes were used to study the electrochemically induced oxide layer formation on the metal surface, the adsorption of hydrogen, and underpotential deposition (UPD) of Cu on Pt electrodes. The performance of microQCM is compared with the performance of a frequency matched overtone mode of a commercial 5 MHz resonator. Micromachined QCMs showed expected sensitivity improvement to UPD of Cu, however an unexpected hundred fold enhancement to oxygen and ~28 times enhancement in the sensitivity to hydrogen adsorption was observed which may be due to the roughness/porosity of the electrodes. © 2008 IEEE. |
| first_indexed | 2025-11-14T06:56:52Z |
| format | Conference Paper |
| id | curtin-20.500.11937-11883 |
| institution | Curtin University Malaysia |
| institution_category | Local University |
| last_indexed | 2025-11-14T06:56:52Z |
| publishDate | 2008 |
| recordtype | eprints |
| repository_type | Digital Repository |
| spelling | curtin-20.500.11937-118832017-09-13T14:55:43Z Performance of micromachined quartz gravimetric sensors upon electrochemical adsorption of monolayers Kao, P. Patwardhan, A. Allara, D. Tadigadapa, S. Strutwolf, J. Arrigan, Damien This paper presents the results of electrochemical calibration experiments performed on micromachined quartz gravimetric sensors. The absolute mass sensitivity of bulk acoustic quartz crystal microbalance (QCM) can be improved into the sub-10-12 g range upon miniaturization of the resonator thickness and area. Using plasma etching, we have fabricated miniaturized QCMs with thicknesses of ~29 µ^m and diameters of 500 µ^m with f0=58 MHz. Resonators with 60 nm thick Ti/Pt top electrodes were used to study the electrochemically induced oxide layer formation on the metal surface, the adsorption of hydrogen, and underpotential deposition (UPD) of Cu on Pt electrodes. The performance of microQCM is compared with the performance of a frequency matched overtone mode of a commercial 5 MHz resonator. Micromachined QCMs showed expected sensitivity improvement to UPD of Cu, however an unexpected hundred fold enhancement to oxygen and ~28 times enhancement in the sensitivity to hydrogen adsorption was observed which may be due to the roughness/porosity of the electrodes. © 2008 IEEE. 2008 Conference Paper http://hdl.handle.net/20.500.11937/11883 10.1109/ICSENS.2008.4716742 restricted |
| spellingShingle | Kao, P. Patwardhan, A. Allara, D. Tadigadapa, S. Strutwolf, J. Arrigan, Damien Performance of micromachined quartz gravimetric sensors upon electrochemical adsorption of monolayers |
| title | Performance of micromachined quartz gravimetric sensors upon electrochemical adsorption of monolayers |
| title_full | Performance of micromachined quartz gravimetric sensors upon electrochemical adsorption of monolayers |
| title_fullStr | Performance of micromachined quartz gravimetric sensors upon electrochemical adsorption of monolayers |
| title_full_unstemmed | Performance of micromachined quartz gravimetric sensors upon electrochemical adsorption of monolayers |
| title_short | Performance of micromachined quartz gravimetric sensors upon electrochemical adsorption of monolayers |
| title_sort | performance of micromachined quartz gravimetric sensors upon electrochemical adsorption of monolayers |
| url | http://hdl.handle.net/20.500.11937/11883 |