Performance of micromachined quartz gravimetric sensors upon electrochemical adsorption of monolayers
This paper presents the results of electrochemical calibration experiments performed on micromachined quartz gravimetric sensors. The absolute mass sensitivity of bulk acoustic quartz crystal microbalance (QCM) can be improved into the sub-10-12 g range upon miniaturization of the resonator thicknes...
| Main Authors: | , , , , , |
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| Format: | Conference Paper |
| Published: |
2008
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| Online Access: | http://hdl.handle.net/20.500.11937/11883 |