Influences of deposition time on TiO2 thin films properties prepared by CVD technique
Titanium dioxide (TiO2) is known as a material with exceptionally good optical, mechanical and thermal properties. An increasing interest has been devoted to the study of TiO2 because of their numerous applications in various industries. In this study, by controlling process parameters, TiO2 thin fi...
| Main Authors: | , , , , , |
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| Format: | Article |
| Published: |
Penerbit UTM Press
2016
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| Subjects: | |
| Online Access: | http://eprints.uthm.edu.my/8863/ |