Junctionless silicon-based device for CO2 and N2O gas detection at room temperature
This article presents a fabrication of junctionless sub-micron silicon wire based device by means of atomic force microscope nanolithography for carbon dioxide and nitrous oxide gas detection. The final product was obtained after a sequence step of silicon and silicon dioxide etching process. The de...
| Main Authors: | , , |
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| Format: | Conference or Workshop Item |
| Published: |
2015
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| Subjects: | |
| Online Access: | http://eprints.uthm.edu.my/6834/ http://eprints.uthm.edu.my/6834/1/249.pdf |