Synthesis and annealing of nanostructured TiO 2 films by radio-frequency magnetron sputtering
In this investigation, anatase TiO 2 thin films were deposited on glass substrates at room temperature by RF magnetron sputtering at an elevated sputtering pressure of 3 Pa. The TiO 2 films deposited at room temperature were annealed at different temperatures up to 873°K for 1 h. The TiO 2 films we...
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Journal of Applied Sciences
2009
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| Online Access: | http://www.scopus.com/inward/record.url?eid=2-s2.0-68949221560&partnerID=40&md5=972d2d11af195245889b59b6d4e41f36 http://www.scopus.com/inward/record.url?eid=2-s2.0-68949221560&partnerID=40&md5=972d2d11af195245889b59b6d4e41f36 |
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um-6791 |
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eprints |
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um-67912017-10-13T09:27:12Z Synthesis and annealing of nanostructured TiO 2 films by radio-frequency magnetron sputtering Hasan, M.M. Haseeb, A.S.M.A. Saidur, R. Masjuki, H.H. Hamdi, M. TA Engineering (General). Civil engineering (General) TJ Mechanical engineering and machinery In this investigation, anatase TiO 2 thin films were deposited on glass substrates at room temperature by RF magnetron sputtering at an elevated sputtering pressure of 3 Pa. The TiO 2 films deposited at room temperature were annealed at different temperatures up to 873°K for 1 h. The TiO 2 films were characterized by X-Ray Diffraction (XRD), Field-Emission Scanning Electron Microscopy (FESEM). Atomic Force Microscopy (AFM) and UV-visible-NIR spectrophotometry. The XRD results reveal that the as-deposited film possess the anatase structure. Annealed TiO 2 films show an insignificant change in crystallinity except of the fact that there is a slight increase for the film annealed at 600°C. The crystallite size increases from 44.5 to 48 nm with the increase of the annealing temperature. As-grown TiO 2 film exhibits high visible transmittance with enhanced refractive index of 2.31 at a wavelength of 550 nm. The indirect optical band gaps of the as-deposited and annealed films have been estimated to be in the range of 3.39-3.42 eV. AFM observations reveal the compact and dense morphology of the as-deposited and annealed TiO 2 thin films. Journal of Applied Sciences 2009 Article PeerReviewed http://www.scopus.com/inward/record.url?eid=2-s2.0-68949221560&partnerID=40&md5=972d2d11af195245889b59b6d4e41f36 Hasan, M.M.; Haseeb, A.S.M.A.; Saidur, R.; Masjuki, H.H.; Hamdi, M. (2009) Synthesis and annealing of nanostructured TiO 2 films by radio-frequency magnetron sputtering. Journal of Applied Sciences <http://eprints.um.edu.my/view/publication/Journal_of_Applied_Sciences.html>, 9 (15). pp. 2815-2821. ISSN 18125654 http://eprints.um.edu.my/6791/ |
| repository_type |
Digital Repository |
| institution_category |
Local University |
| institution |
University Malaya |
| building |
UM Research Repository |
| collection |
Online Access |
| topic |
TA Engineering (General). Civil engineering (General) TJ Mechanical engineering and machinery |
| spellingShingle |
TA Engineering (General). Civil engineering (General) TJ Mechanical engineering and machinery Hasan, M.M. Haseeb, A.S.M.A. Saidur, R. Masjuki, H.H. Hamdi, M. Synthesis and annealing of nanostructured TiO 2 films by radio-frequency magnetron sputtering |
| description |
In this investigation, anatase TiO 2 thin films were deposited on glass substrates at room temperature by RF magnetron sputtering at an elevated sputtering pressure of 3 Pa. The TiO 2 films deposited at room temperature were annealed at different temperatures up to 873°K for 1 h. The TiO 2 films were characterized by X-Ray Diffraction (XRD), Field-Emission Scanning Electron Microscopy (FESEM). Atomic Force Microscopy (AFM) and UV-visible-NIR spectrophotometry. The XRD results reveal that the as-deposited film possess the anatase structure. Annealed TiO 2 films show an insignificant change in crystallinity except of the fact that there is a slight increase for the film annealed at 600°C. The crystallite size increases from 44.5 to 48 nm with the increase of the annealing temperature. As-grown TiO 2 film exhibits high visible transmittance with enhanced refractive index of 2.31 at a wavelength of 550 nm. The indirect optical band gaps of the as-deposited and annealed films have been estimated to be in the range of 3.39-3.42 eV. AFM observations reveal the compact and dense morphology of the as-deposited and annealed TiO 2 thin films. |
| format |
Article |
| author |
Hasan, M.M. Haseeb, A.S.M.A. Saidur, R. Masjuki, H.H. Hamdi, M. |
| author_facet |
Hasan, M.M. Haseeb, A.S.M.A. Saidur, R. Masjuki, H.H. Hamdi, M. |
| author_sort |
Hasan, M.M. |
| title |
Synthesis and annealing of nanostructured TiO 2 films by radio-frequency magnetron sputtering |
| title_short |
Synthesis and annealing of nanostructured TiO 2 films by radio-frequency magnetron sputtering |
| title_full |
Synthesis and annealing of nanostructured TiO 2 films by radio-frequency magnetron sputtering |
| title_fullStr |
Synthesis and annealing of nanostructured TiO 2 films by radio-frequency magnetron sputtering |
| title_full_unstemmed |
Synthesis and annealing of nanostructured TiO 2 films by radio-frequency magnetron sputtering |
| title_sort |
synthesis and annealing of nanostructured tio 2 films by radio-frequency magnetron sputtering |
| publisher |
Journal of Applied Sciences |
| publishDate |
2009 |
| url |
http://www.scopus.com/inward/record.url?eid=2-s2.0-68949221560&partnerID=40&md5=972d2d11af195245889b59b6d4e41f36 http://www.scopus.com/inward/record.url?eid=2-s2.0-68949221560&partnerID=40&md5=972d2d11af195245889b59b6d4e41f36 |
| first_indexed |
2018-09-06T05:21:20Z |
| last_indexed |
2018-09-06T05:21:20Z |
| _version_ |
1610834280196341760 |