Effect of nitrogen flow rate on structural, morphological and optical properties of In-rich InxAl1-xN thin films grown by plasma-assisted dual source reactive evaporation

Effect of nitrogen flow rate on structural, morphological and optical properties of In-rich InxAl1-xN thin films grown by plasma-assisted dual source reactive evaporation

In-rich InxAl1-xN thin films were deposited on quartz substrate at various nitrogen flow rates by plasma-assisted dual source reactive evaporation technique. The elemental composition, surface morphology, structural and optical properties of the films were investigated by X-ray photoelectron spectro...

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Bibliographic Details
Main Authors: Alizadeh, M., Ganesh, V., Goh, B.T., Dee, C.F., Mohmad, A.R., Rahman, S.A.
Format: Article
Published: Elsevier 2016
Subjects:
Q Science (General)
QC Physics
Online Access:https://doi.org/10.1016/j.apsusc.2016.03.174
https://doi.org/10.1016/j.apsusc.2016.03.174

Internet

https://doi.org/10.1016/j.apsusc.2016.03.174
https://doi.org/10.1016/j.apsusc.2016.03.174

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