405nm laser processing of thin SU-8 polymer film
This paper presents a comprehensive study on the effect of laser fluence on a negative tone thin film resist, SU-8, using an all-fibre 405 nm laser direct writing technique. 405 nm Gaussian beam is delivered on the spin-coated SU-8 thin film using single mode fibre, followed by subsequent chemical d...
| Main Authors: | , , , , , |
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| Format: | Article |
| Published: |
Elsevier
2016
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| Subjects: | |
| Online Access: | http://dx.doi.org/10.1016/j.ijleo.2015.11.057 http://dx.doi.org/10.1016/j.ijleo.2015.11.057 |