Physical and dispersive optical characteristics of ZrON/Si thin-film system
To date, the complex evaluation of physical and dispersive optical characteristics of the ZrON/Si film system has yet been reported. Hence, ZrON thin films have been formed on Si(100) substrates through oxidation/nitridation of sputtered metallic Zr in N2O environment at 500, 700, and 900 ∘C. Physic...
| Main Authors: | , , , |
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| Format: | Article |
| Published: |
Springer Verlag (Germany)
2014
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| Subjects: | |
| Online Access: | http://link.springer.com/article/10.1007%2Fs00339-013-7947-1 http://link.springer.com/article/10.1007%2Fs00339-013-7947-1 |