Investigation of optical and structural properties of ion-assisted deposition (IAD) ZrO2 thin films
Zirconium dioxide thin films were deposited onto fused silica glass substrates by electron-beam assisted by oxygen ions using high vacuum coater equipped with electron beam gun at ambient substrate temperature. The properties of the films have been investigated using X-ray diffraction (XRD), X-ray p...
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| Format: | Article |
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Springer Verlag (Germany)
2013
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| Online Access: | http://link.springer.com/article/10.1007%2Fs12541-013-0271-z http://link.springer.com/article/10.1007%2Fs12541-013-0271-z |