Mid-infrared materials and devices on a Si platform for optical sensing
In this article, we review our recent work on mid-infrared (mid-IR) photonic materials and devices fabricated on silicon for on-chip sensing applications. Pedestal waveguides based on silicon are demonstrated as broadband mid-IR sensors. Our low-loss mid-IR directional couplers demonstrated in SiNx...
Main Authors: | , , , , , , , , , , , , , , , , , , , , |
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Format: | Online |
Language: | English |
Published: |
Taylor & Francis
2014
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Online Access: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5090602/ |