On the Crystal Structural Control of Sputtered TiO2 Thin Films
In this study, we focused on the origin on the selective deposition of rutile and anatase TiO2 thin films during the sputtering process. The observation on microstructural evolution of the TiO2 films by transmission electron microscopy revealed the coexistence of rutile and anatase TiO2 phases in th...
| Main Authors: | , , , |
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| Format: | Online |
| Language: | English |
| Published: |
Springer US
2016
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| Online Access: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4936979/ |