ZnO-Based Microcavities Sculpted by Focus Ion Beam Milling

We reported an easy fabrication method to realize ZnO-based microcavities with various cavity shapes by focused ion beam (FIB) milling. The optical characteristics of different shaped microcavities have been systematically carried out and analyzed. Through comprehensive studies of cathodoluminescenc...

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Bibliographic Details
Main Authors: Chang, Tsu-Chi, Hong, Kuo-Bin, Lai, Ying-Yu, Chou, Yu-Hsun, Wang, Shing-Chung, Lu, Tien-Chang
Format: Online
Language:English
Published: Springer US 2016
Online Access:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4929116/