One-Step Mask Etching Strategy Toward Ordered Ferroelectric Pb(Zr0.52Ti0.48)O3 Nanodot Arrays

One-Step Mask Etching Strategy Toward Ordered Ferroelectric Pb(Zr0.52Ti0.48)O3 Nanodot Arrays

In this report, ordered lead zirconate titanate Pb(Zr0.52Ti0.48)O3 (PZT) nanodot arrays were fabricated by an original one-step mask etching route. The one-step mask etching strategy is based on the patterned nanostructure of barrier layer (BL) at the bottom of anodic aluminum oxide (AAO), by a dire...

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Bibliographic Details
Main Authors: Zhang, Xiaoyan, Kang, Mengyang, Huang, Kangrong, Zhang, Fengyuan, Lin, Sixian, Gao, Xingsen, Lu, Xubing, Zhang, Zhang, Liu, Junming
Format: Online
Language:English
Published: Springer US 2015
Online Access:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4527975/

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https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4527975/

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