Scanning reflection ion microscopy in a helium ion microscope
Reflection ion microscopy (RIM) is a technique that uses a low angle of incidence and scattered ions to form an image of the specimen surface. This paper reports on the development of the instrumentation and the analysis of the capabilities and limitations of the scanning RIM in a helium ion microsc...
| Main Authors: | , |
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| Format: | Online |
| Language: | English |
| Published: |
Beilstein-Institut
2015
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| Online Access: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4463972/ |