Fabrication of high-Q lithium niobate microresonators using femtosecond laser micromachining

Fabrication of high-Q lithium niobate microresonators using femtosecond laser micromachining

We report on fabrication of high-Q lithium niobate (LN) whispering-gallery-mode (WGM) microresonators suspended on silica pedestals by femtosecond laser direct writing followed by focused ion beam (FIB) milling. The micrometer-scale (diameter ~82 μm) LN resonator possesses a Q factor of ~2.5 × 105 a...

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Bibliographic Details
Main Authors: Lin, Jintian, Xu, Yingxin, Fang, Zhiwei, Wang, Min, Song, Jiangxin, Wang, Nengwen, Qiao, Lingling, Fang, Wei, Cheng, Ya
Format: Online
Language:English
Published: Nature Publishing Group 2015
Online Access:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4308694/

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https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4308694/

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