Coherent X-Ray Diffraction Imaging and Characterization of Strain in Silicon-on-Insulator Nanostructures

Coherent X-Ray Diffraction Imaging and Characterization of Strain in Silicon-on-Insulator Nanostructures

Coherent X-ray diffraction imaging (CDI) has emerged in the last decade as a promising high resolution lens-less imaging approach for the characterization of various samples. It has made significant technical progress through developments in source, algorithm and imaging methodologies thus enabling...

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Bibliographic Details
Main Authors: Xiong, Gang, Moutanabbir, Oussama, Reiche, Manfred, Harder, Ross, Robinson, Ian
Format: Online
Language:English
Published: BlackWell Publishing Ltd 2014
Online Access:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4282757/

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https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4282757/

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