The Stiffness Variation of a Micro-Ring Driven by a Traveling Piecewise-Electrode
In the practice of electrostatically actuated micro devices; the electrostatic force is implemented by sequentially actuated piecewise-electrodes which result in a traveling distributed electrostatic force. However; such force was modeled as a traveling concentrated electrostatic force in literature...
| Main Authors: | , , |
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| Format: | Online |
| Language: | English |
| Published: |
MDPI
2014
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| Online Access: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4208223/ |