Fabrication and characterization of well-aligned plasmonic nanopillars with ultrasmall separations
We show the fabrication of well-aligned gold and silver nanopillars with various array parameters via interference lithography followed by ion beam milling and compare the etching rates of these two metallic materials. Silver is suitable for fabricating ultrafine arrays with ultrasmall separations d...
| Main Authors: | , , , , |
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| Format: | Online |
| Language: | English |
| Published: |
Springer
2014
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| Online Access: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4061926/ |