Effect of In/Al ratios on structural and optical properties of InAlN films grown on Si(100) by RF-MOMBE

Effect of In/Al ratios on structural and optical properties of InAlN films grown on Si(100) by RF-MOMBE

In x Al1-x N films were deposited on Si(100) substrate using metal-organic molecular beam epitaxy. We investigated the effect of the trimethylindium/trimethylaluminum (TMIn/TMAl) flow ratios on the structural, morphological, and optical properties of In x Al1-x N films. Surface morphologies and micr...

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Bibliographic Details
Main Authors:	Chen, Wei-Chun, Wu, Yue-Han, Peng, Chun-Yen, Hsiao, Chien-Nan, Chang, Li
Format:	Online
Language:	English
Published:	Springer 2014
Online Access:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4012525/

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