Quantitative Accelerated Life Testing of MEMS Accelerometers

Quantitative Accelerated Life Testing (QALT) is a solution for assessing the reliability of Micro Electro Mechanical Systems (MEMS). A procedure for QALT is shown in this paper and an attempt to assess the reliability level for a batch of MEMS accelerometers is reported. The testing plan is applicat...

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Main Authors:	Bâzu, Marius, Gălăţeanu, Lucian, Ilian, Virgil Emil, Loicq, Jerome, Habraken, Serge, Collette, Jean-Paul
Format:	Online
Language:	English
Published:	Molecular Diversity Preservation International (MDPI) 2007
Online Access:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3965216/

id	pubmed-3965216
recordtype	oai_dc
spelling	pubmed-39652162014-03-25 Quantitative Accelerated Life Testing of MEMS Accelerometers Bâzu, Marius Gălăţeanu, Lucian Ilian, Virgil Emil Loicq, Jerome Habraken, Serge Collette, Jean-Paul Full Research Paper Quantitative Accelerated Life Testing (QALT) is a solution for assessing the reliability of Micro Electro Mechanical Systems (MEMS). A procedure for QALT is shown in this paper and an attempt to assess the reliability level for a batch of MEMS accelerometers is reported. The testing plan is application-driven and contains combined tests: thermal (high temperature) and mechanical stress. Two variants of mechanical stress are used: vibration (at a fixed frequency) and tilting. Original equipment for testing at tilting and high temperature is used. Tilting is appropriate as application-driven stress, because the tilt movement is a natural environment for devices used for automotive and aerospace applications. Also, tilting is used by MEMS accelerometers for anti-theft systems. The test results demonstrated the excellent reliability of the studied devices, the failure rate in the “worst case” being smaller than 10-7h-1. Molecular Diversity Preservation International (MDPI) 2007-11-20 /pmc/articles/PMC3965216/ /pubmed/28903265 Text en © 2007 by MDPI (http://www.mdpi.org). Reproduction is permitted for noncommercial purposes.
repository_type	Open Access Journal
institution_category	Foreign Institution
institution	US National Center for Biotechnology Information
building	NCBI PubMed
collection	Online Access
language	English
format	Online
author	Bâzu, Marius Gălăţeanu, Lucian Ilian, Virgil Emil Loicq, Jerome Habraken, Serge Collette, Jean-Paul
spellingShingle	Bâzu, Marius Gălăţeanu, Lucian Ilian, Virgil Emil Loicq, Jerome Habraken, Serge Collette, Jean-Paul Quantitative Accelerated Life Testing of MEMS Accelerometers
author_facet	Bâzu, Marius Gălăţeanu, Lucian Ilian, Virgil Emil Loicq, Jerome Habraken, Serge Collette, Jean-Paul
author_sort	Bâzu, Marius
title	Quantitative Accelerated Life Testing of MEMS Accelerometers
title_short	Quantitative Accelerated Life Testing of MEMS Accelerometers
title_full	Quantitative Accelerated Life Testing of MEMS Accelerometers
title_fullStr	Quantitative Accelerated Life Testing of MEMS Accelerometers
title_full_unstemmed	Quantitative Accelerated Life Testing of MEMS Accelerometers
title_sort	quantitative accelerated life testing of mems accelerometers
description	Quantitative Accelerated Life Testing (QALT) is a solution for assessing the reliability of Micro Electro Mechanical Systems (MEMS). A procedure for QALT is shown in this paper and an attempt to assess the reliability level for a batch of MEMS accelerometers is reported. The testing plan is application-driven and contains combined tests: thermal (high temperature) and mechanical stress. Two variants of mechanical stress are used: vibration (at a fixed frequency) and tilting. Original equipment for testing at tilting and high temperature is used. Tilting is appropriate as application-driven stress, because the tilt movement is a natural environment for devices used for automotive and aerospace applications. Also, tilting is used by MEMS accelerometers for anti-theft systems. The test results demonstrated the excellent reliability of the studied devices, the failure rate in the “worst case” being smaller than 10-7h-1.
publisher	Molecular Diversity Preservation International (MDPI)
publishDate	2007
url	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3965216/
_version_	1612071093636431872

Quantitative Accelerated Life Testing of MEMS Accelerometers

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