Silicon Carbide-Based Hydrogen Gas Sensors for High-Temperature Applications
We investigated SiC-based hydrogen gas sensors with metal-insulator-semiconductor (MIS) structure for high temperature process monitoring and leak detection applications in fields such as the automotive, chemical and petroleum industries. In this work, a thin tantalum oxide (Ta2O5) layer was exploit...
| Main Authors: | , , , , |
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| Format: | Online |
| Language: | English |
| Published: |
Molecular Diversity Preservation International (MDPI)
2013
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| Online Access: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3859079/ |