Three Cavity Tunable MEMS Fabry Perot Interferometer

In this paper a four-mirror tunable micro electro-mechanical systems (MEMS) Fabry Perot Interferometer (FPI) concept is proposed with the mathematical model. The spectral range of the proposed FPI lies in the infrared spectrum ranging from 2400 to 4018 (nm). FPI can be finely tuned by deflecting the...

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Main Authors:	Parashar, Avinash, Shah, Ankur, Packirisamy, Muthukumaran, Sivakumar, Narayanswamy
Format:	Online
Language:	English
Published:	Molecular Diversity Preservation International (MDPI) 2007
Online Access:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3841881/

id	pubmed-3841881
recordtype	oai_dc
spelling	pubmed-38418812013-11-29 Three Cavity Tunable MEMS Fabry Perot Interferometer Parashar, Avinash Shah, Ankur Packirisamy, Muthukumaran Sivakumar, Narayanswamy Communication In this paper a four-mirror tunable micro electro-mechanical systems (MEMS) Fabry Perot Interferometer (FPI) concept is proposed with the mathematical model. The spectral range of the proposed FPI lies in the infrared spectrum ranging from 2400 to 4018 (nm). FPI can be finely tuned by deflecting the two middle mirrors (or by changing the three cavity lengths). Two different cases were separately considered for the tuning. In case one, tuning was achieved by deflecting mirror 2 only and in case two, both mirrors 2 and 3 were deflected for the tuning of the FPI. Molecular Diversity Preservation International (MDPI) 2007-12-04 /pmc/articles/PMC3841881/ /pubmed/28903280 Text en © 2007 by MDPI (http://www.mdpi.org). Reproduction is permitted for noncommercial purposes.
repository_type	Open Access Journal
institution_category	Foreign Institution
institution	US National Center for Biotechnology Information
building	NCBI PubMed
collection	Online Access
language	English
format	Online
author	Parashar, Avinash Shah, Ankur Packirisamy, Muthukumaran Sivakumar, Narayanswamy
spellingShingle	Parashar, Avinash Shah, Ankur Packirisamy, Muthukumaran Sivakumar, Narayanswamy Three Cavity Tunable MEMS Fabry Perot Interferometer
author_facet	Parashar, Avinash Shah, Ankur Packirisamy, Muthukumaran Sivakumar, Narayanswamy
author_sort	Parashar, Avinash
title	Three Cavity Tunable MEMS Fabry Perot Interferometer
title_short	Three Cavity Tunable MEMS Fabry Perot Interferometer
title_full	Three Cavity Tunable MEMS Fabry Perot Interferometer
title_fullStr	Three Cavity Tunable MEMS Fabry Perot Interferometer
title_full_unstemmed	Three Cavity Tunable MEMS Fabry Perot Interferometer
title_sort	three cavity tunable mems fabry perot interferometer
description	In this paper a four-mirror tunable micro electro-mechanical systems (MEMS) Fabry Perot Interferometer (FPI) concept is proposed with the mathematical model. The spectral range of the proposed FPI lies in the infrared spectrum ranging from 2400 to 4018 (nm). FPI can be finely tuned by deflecting the two middle mirrors (or by changing the three cavity lengths). Two different cases were separately considered for the tuning. In case one, tuning was achieved by deflecting mirror 2 only and in case two, both mirrors 2 and 3 were deflected for the tuning of the FPI.
publisher	Molecular Diversity Preservation International (MDPI)
publishDate	2007
url	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3841881/
_version_	1612031147122884608

Three Cavity Tunable MEMS Fabry Perot Interferometer

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