Fabrication and Characterization of PZT Thick Films for Sensing and Actuation
Lead Zirconate Titanate oxide (PZT) thick films with thicknesses of up to 10 mm were developed using a modified sol-gel technique. Usually, the film thickness is less than 1 mm by conventional sol-gel processing, while the electrical charge accumulation which reveals the direct effect of piezoelectr...
| Main Authors: | , |
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| Format: | Online |
| Language: | English |
| Published: |
Molecular Diversity Preservation International (MDPI)
2007
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| Online Access: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3800361/ |