Highly organised and dense vertical silicon nanowire arrays grown in porous alumina template on <100> silicon wafers
In this work, nanoimprint lithography combined with standard anodization etching is used to make perfectly organised triangular arrays of vertical cylindrical alumina nanopores onto standard <100>−oriented silicon wafers. Both the pore diameter and the period of alumina porous array are well c...
| Main Authors: | , , , , , |
|---|---|
| Format: | Online |
| Language: | English |
| Published: |
Springer
2013
|
| Online Access: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3686656/ |