Submicron machining and biomolecule immobilization on porous silicon by electron beam
Three-dimensional submicrometric structures and biomolecular patterns have been fabricated on a porous silicon film by an electron beam-based functionalization method. The immobilized proteins act as a passivation layer against material corrosion in aqueous solutions. The effects' dependence on...
Main Authors: | , , , |
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Format: | Online |
Language: | English |
Published: |
Springer
2012
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Online Access: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3477033/ |