Synthesis and electrical characterization of intrinsic and in situ doped Si nanowires using a novel precursor
Perchlorinated polysilanes were synthesized by polymerization of tetrachlorosilane under cold plasma conditions with hydrogen as a reducing agent. Subsequent selective cleavage of the resulting polymer yielded oligochlorosilanes SinCl2 n +2 (n = 2, 3) from which the octachlorotrisilane (n = 3, Cl8Si...
| Main Authors: | , , , , , , |
|---|---|
| Format: | Online |
| Language: | English |
| Published: |
Beilstein-Institut
2012
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| Online Access: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3458602/ |