High-aspect ratio nanochannel formation by single femtosecond laser pulses

Single femtosecond pulsed laser damage can be confined radially to regions smaller than the focus spot size due to the highly nonlinear mechanisms for energy absorption and ablation in transparent dielectrics. Along the propagation axis, however, we show that channels can be machined much deeper tha...

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Bibliographic Details
Main Authors: Herbstman, Jeffrey F., Hunt, Alan J.
Format: Online
Language:English
Published: Optical Society of America 2010
Online Access:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3379818/