Fabrication and characterization of High Q polymer micro-ring resonator and its application as a sensitive ultrasonic detector
Smooth sidewall silicon micro-ring molds have been fabricated using resist reflow and thermal oxidation method. High Q factor polymer micro-ring resonators have been fabricated using these molds. Quality factors as high as 105 have been measured at telecommunication wavelength range. By carefully ex...
| Main Authors: | , , |
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| Format: | Online |
| Language: | English |
| Published: |
Optical Society of America
2011
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| Online Access: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3368304/ |