CMOS-Integrated Film Bulk Acoustic Resonators for Label-Free Biosensing

CMOS-Integrated Film Bulk Acoustic Resonators for Label-Free Biosensing

The throughput is an important parameter for label-free biosensors. Acoustic resonators like the quartz crystal microbalance have a low throughput because the number of sensors which can be used at the same time is limited. Here we present an array of 64 CMOS-integrated film bulk acoustic resonators...

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Bibliographic Details
Main Authors: Nirschl, Martin, Rantala, Arto, Tukkiniemi, Kari, Auer, Sanna, Hellgren, Ann-Charlotte, Pitzer, Dana, Schreiter, Matthias, Vikholm-Lundin, Inger
Format: Online
Language:English
Published: Molecular Diversity Preservation International (MDPI) 2010
Online Access:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3292114/

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https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3292114/

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