Design, Fabrication, and Testing of a Bulk Micromachined Inertial Measurement Unit
A bulk micromachined inertial measurement unit (MIMU) is presented in this paper. Three single-axis accelerometers and three single-axis gyroscopes were simultaneously fabricated on a silicon wafer using a bulk micromachining process; the wafer is smaller than one square centimeter. In particular, a...
| Main Authors: | , , , , , |
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| Format: | Online |
| Language: | English |
| Published: |
Molecular Diversity Preservation International (MDPI)
2010
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| Online Access: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3274250/ |