A Miniature Fiber Optic Refractive Index Sensor Built in a MEMS-Based Microchannel

A Miniature Fiber Optic Refractive Index Sensor Built in a MEMS-Based Microchannel

A small, highly sensitive, and electromagnetic interference (EMI)-immune refractive index (RI) sensor based on the Fabry-Perot (FP) interferometer is presented. The sensor’s FP cavity was fabricated by aligning two metal-deposited, single-mode optical fiber endfaces inside a microchannel on a silico...

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Bibliographic Details
Main Authors: Tian, Ye, Wang, Wenhui, Wu, Nan, Zou, Xiaotian, Guthy, Charles, Wang, Xingwei
Format: Online
Language:English
Published: Molecular Diversity Preservation International (MDPI) 2011
Online Access:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3274117/

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3274117/

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