Fractal Nanotechnology
Self-similar patterns are frequently observed in Nature. Their reproduction is possible on a length scale 102–105 nm with lithographic methods, but seems impossible on the nanometer length scale. It is shown that this goal may be achieved via a multiplicative variant of the multi-spacer patterning t...
| Main Authors: | , , , |
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| Format: | Online |
| Language: | English |
| Published: |
Springer
2008
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| Online Access: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3244899/ |