Fractal Nanotechnology

Self-similar patterns are frequently observed in Nature. Their reproduction is possible on a length scale 102–105 nm with lithographic methods, but seems impossible on the nanometer length scale. It is shown that this goal may be achieved via a multiplicative variant of the multi-spacer patterning t...

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Bibliographic Details
Main Authors: Cerofolini, GF, Narducci, D, Amato, P, Romano, E
Format: Online
Language:English
Published: Springer 2008
Online Access:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3244899/