Fabrication of Large Area Periodic Nanostructures Using Nanosphere Photolithography
Large area periodic nanostructures exhibit unique optical and electronic properties and have found many applications, such as photonic band-gap materials, high dense data storage, and photonic devices. We have developed a maskless photolithography method—Nanosphere Photolithography (NSP)—to produce...
| Main Authors: | , , , , |
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| Format: | Online |
| Language: | English |
| Published: |
Springer
2008
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| Online Access: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3244895/ |